Automated Monitoring of Airborne Molecular Contamination (AMC)

The all-in-one analyzer for FOUP, fab and clean-room environment AMC monitoring in the semiconductor industry.

AMC-Monitor T-1000 Overview

The AMC-Monitor is a modular and flexible platform for Airborne Molecular Contaminations (AMC) monitoring in semiconductor applications such as:

• FOUP analysis with a focus on VOC and condensables incl. full integration with Pfeiffer Vacuum APA 302 pod analyzer. 
• Clean-room monitoring in fabrication plants: automated detection of AMC at multiple sampling points with an integrated multiplexing system, directly in the fab at variable locations and even at the tool-level.
• Monitoring of outside and intake air: automated fence line monitoring incl. alarm levels, up- and downstream filter testing.

The custom-made analyzer is based on the most suitable IONICON PTR-TOFMS series instrument for the particular application and the Automated Measurement and Evaluation AME software suite with pre-set recipes for your monitoring challenge. The scalable multiplexing solution minimizes analysis costs per sampling point.

Expect these benefits in combination with the advantages only a time-of-flight (TOF) based analyzer offers:

• incredible speed
• high sensitivity
• enhanced separation for complex samples.

The IONICON AMC-Monitor is the ideal tool for current and future challenges in the semiconductor industry.

AMC-Monitor T-1000 Features and Benefits

Loaded with…

• Several soft chemical ionization modes – wide component range
• Renowned PTR-MS and SRI-MS technology
• AME monitoring solution software
• Enhanced separation, identification and quantification capabilities
• Full mass spectral analysis in a split second
• On-line LOD (limit of detection) < 1 pptv
• Response time below 100 ms
• On-board multiplexing (multiple sampling lines) and calibration

Expect this…

• Simultaneous quantification of several hundred substances in real-time
• Pre-set expert recipes to choose from for the analysis of target species
• Simple graphical user interface
• Clean-room AMC monitoring, filter tests, fence-line and supply air monitoring
• FOUP contaminations detection integrated with Pfeiffer Vacuum APA 302 pod analyzer
• Industrial integration via Modbus TCP
• Remote control and data reporting 
• Fit for future updates and upgrades
• Stand-alone or optional integration with Pfeiffer Vacuum AMPC systems

AMC-Monitoring Applications

FOUP monitoring

Analysis of AMC contamination in FOUP – focus on VOC and condensables. Full integration with Pfeiffer Vacuum APA 302 pod analyzer available.
Typical relevant substances:

• Acetone
• IPA
• Toluene
• CNF / PFTBA
• COF
• MEK
• PGME

Fab clean-room monitoring

Automated monitoring of AMC at multiple sampling points. Full integration with Pfeiffer Vacuum AMPC systems available.
Typical relevant substances:

• Trimethylsilanol, HMDSO
• PGMEA, PGME
• Siloxanes
• Acetic Acid
• Ethyl Acetate, Ethyl Lactate
• BTEX
• Chloro-carbons
• Perfluoro-carbons

Monitoring of outside air

Automated fence line monitoring incl. alarm levels.
Typical relevant substances:

• Organic acids (e.g. acetic acid, formic acid)
• Aldehydes, Ketones, Glycolic compounds
• Pyrolysis Products from biomass burn
• VOC & Condensables (sticky compounds)

Sulfur compounds

• H2S,
• Mercaptans,
• Thioethers

Nitrogen containing compounds

• Acetonitrile (biomass burning)
• NH3,
• Amines

Contact us for your individual AMC-Monitor solution!