Automatic Monitoring Systems - AMC-Monitor 1000 series
The AMC-Monitor 1000 series is the first on-line and real-time equipment capable to monitor various organic constituents in parallel in gas and air.
The AMC-Monitor C-1000 based on a PTR-QMS 300 instrument has established a new standard in the detection of dynamic contamination levels in process environments, developed together with our partner artemis control AG. It was a breakthrough in online monitoring of clean-room air in the fab and ideally suited for a limited number of substances to be detected with a quadrupole analyzer.
Now the new AMC-Monitor T-1000 is available, based on the IONICON PTR-TOFMS series featuring advanced time-of-flight technology. The latest generation of the real-time analyzer monitors most volatile organic and several inorganic compounds in parallel with a pptv-level detection limit. The T-1000 outperforms quadrupole based analyzers and offers the following unique benefits:
- detection of entire range of relevant substances in split-seconds - no selection of masses - no waiting
- faster and more sensitive for complex mixtures
- high mass resolution for better separation and identification
- pptv-level detection limits
24/7 real-time monitoring allows the detection of short-term spills and leckages to track and document AMC levels and to rapidly alert upon critical concentrations. The high sampling frequency also fosters monitoring multiple sampling points in parallel through optional multiplexing systems. This enables the parallel monitoring of clean-room environment, but also the FOUP or tool-level which plays an important role in present semiconductor production processes.
The AMC-Monitor T-1000 can easily be specialized to various monitoring applications by loading application specific recipes. Contact us to challenge our team with your AMC application!