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Clean-room Monitoring

Monitoring of volatile organic contamination in cleanroom environments

Airborne molecular contamination (AMC) are a concern for high-techn manufacturing processes. PTR-MS can monitor these contaminations in continuously and in real-time.

Microelectronics industry - clean room AMC monitoring

Airborne molecular contamination (AMC) is a concern for high-tech manufacturing processes, especially in the microelectronics industry. Organic contamination can cause adverse effects on production tools and consequently increase costs. Contamination-free manufacturing is a viable goal and is achieved by source control and source monitoring in combination with filtration solutions in air handling systems. Permanent monitoring of the AMC level helps to identify sources, stabilizes production and prevents unexpected shortfalls of the service life of filtration units.

IONICON Analytik GmbH, with its ultra-sensitive real-time trace gas monitoring solutions, provides powerful tools to detect organic contamination and to continuously monitor clean-room environments.

Results of PTR-MS measurements - clean room environment testing

PTR-MS gives our customers the ability to measure continuously over a long period of time  without taking specific point-of-time samples like when using a sampler. The detection limit, nevertheless, is as low as 5 pptv.

The level of AMC contamination in cleanroom environments is predominately created by internal sources of solvents, acetic acid, re-entrainment of exhaust air, aromatic compounds from ambient air and return air as well as material outgassings. Even more important, spills, leaks and mishandling have to be taken into account and can cause serious costs in terms of wafer loss and tool-down time.

PTR-MS offers itself to monitor production-critical compounds like phosphates, phthalates and other VOCs. Incidents that can cause production failures and yield losses, can be immediately seen online. Corrective actions can be taken to optimize the processes.

Automatic Monitoring system - AMC-Monitor C-1000

AMC MonitorThe AMC-Monitor C-1000 is the first on-line and real-time equipment capable to monitor various organic constituents in parallel in gas and air. Developped jointly in a cooperative project with artemis control AG, Switzerland, the AMC-Monitor C-1000 is establishing a new standard in the detection of dynamic contamination levels in process environments.

Monitoring and detection of short-term spills and leckages 24 hours a day are the basis for tracking process conditions and enable alert situations. Moreover, with the ongoing documentation of permanently pure operation conditions a precious process tool is at hand. The C-1000 is easily adaptable to different monitoring tasks by changing application libraries, that can be loaded to the instrument. Read more about the product and its capabilities following this link:

www.AMC-Monitor.com